DocumentCode
2874268
Title
Ellipsometric Investigation of Micropore Formation in Silicon Layers Implanted by High Dose Ions of Krypton.
Author
Buynova, E.Y. ; Galjautdinov, M.F. ; Kurbatova, N.V. ; LShtyrkov, E.
fYear
1996
fDate
8-13 Sept. 1996
Firstpage
197
Lastpage
197
Keywords
Artificial intelligence; Chemical lasers; Inorganic materials; Laser ablation; Optical materials; Particle beam optics; Polymers; Silicon; Spectroscopy; X-ray lasers;
fLanguage
English
Publisher
ieee
Conference_Titel
Lasers and Electro-optics Europe, 1996. CLEO/Europe., Conference on
Conference_Location
Hamburg, Germany
Print_ISBN
0-7803-3169-9
Type
conf
DOI
10.1109/CLEOE.1996.562322
Filename
562322
Link To Document