• DocumentCode
    2874275
  • Title

    Rapid prototyping of glass chip with micro-powder blasting using nano-particles dispersed polymer

  • Author

    Yagyu, Hiromasa ; Sugano, Kouji ; Hayashi, Shigehiko ; Tabata, Osamu

  • Author_Institution
    Mitsuboshi Belting Ltd., Kobe, Japan
  • fYear
    2004
  • fDate
    2004
  • Firstpage
    697
  • Lastpage
    700
  • Abstract
    We present a new rapid prototyping technique to produce a glass chip with high aspect ratio channel for micro total analysis system (μTAS). This technique consists of powder blasting technique and laser patterning of newly developed Au nano-particles dispersed polymer mask. The microchannel with maximum aspect ratio of 2.1 in a glass substrate was successfully realized without photolithography step. The proposed technique was applied to a glass chip for electrophoresis and its performance for DNA separation analysis was confirmed. Furthermore, the micro-powder blasting technique with elevated temperature of Au nano-particles dispersed polymer mask was proposed for the first time.
  • Keywords
    DNA; electrophoresis; glass; gold; laser materials processing; molecular biophysics; nanoparticles; photolithography; Au; Au nanoparticles dispersed polymer; DNA separation analysis; electrophoresis; glass chip rapid prototyping; glass substrate; laser patterning; micro powder blasting; micro total analysis system; photolithography; powder blasting technique; DNA; Electrokinetics; Glass; Gold; Lithography; Microchannel; Performance analysis; Polymers; Powders; Prototypes;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Micro Electro Mechanical Systems, 2004. 17th IEEE International Conference on. (MEMS)
  • Print_ISBN
    0-7803-8265-X
  • Type

    conf

  • DOI
    10.1109/MEMS.2004.1290680
  • Filename
    1290680