DocumentCode
2874275
Title
Rapid prototyping of glass chip with micro-powder blasting using nano-particles dispersed polymer
Author
Yagyu, Hiromasa ; Sugano, Kouji ; Hayashi, Shigehiko ; Tabata, Osamu
Author_Institution
Mitsuboshi Belting Ltd., Kobe, Japan
fYear
2004
fDate
2004
Firstpage
697
Lastpage
700
Abstract
We present a new rapid prototyping technique to produce a glass chip with high aspect ratio channel for micro total analysis system (μTAS). This technique consists of powder blasting technique and laser patterning of newly developed Au nano-particles dispersed polymer mask. The microchannel with maximum aspect ratio of 2.1 in a glass substrate was successfully realized without photolithography step. The proposed technique was applied to a glass chip for electrophoresis and its performance for DNA separation analysis was confirmed. Furthermore, the micro-powder blasting technique with elevated temperature of Au nano-particles dispersed polymer mask was proposed for the first time.
Keywords
DNA; electrophoresis; glass; gold; laser materials processing; molecular biophysics; nanoparticles; photolithography; Au; Au nanoparticles dispersed polymer; DNA separation analysis; electrophoresis; glass chip rapid prototyping; glass substrate; laser patterning; micro powder blasting; micro total analysis system; photolithography; powder blasting technique; DNA; Electrokinetics; Glass; Gold; Lithography; Microchannel; Performance analysis; Polymers; Powders; Prototypes;
fLanguage
English
Publisher
ieee
Conference_Titel
Micro Electro Mechanical Systems, 2004. 17th IEEE International Conference on. (MEMS)
Print_ISBN
0-7803-8265-X
Type
conf
DOI
10.1109/MEMS.2004.1290680
Filename
1290680
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