• DocumentCode
    2874408
  • Title

    Flexible Fabs

  • Author

    Hannon, Cy

  • Author_Institution
    LSI Logic Corporation
  • fYear
    1993
  • fDate
    20-21 Sept. 1993
  • Keywords
    Application specific integrated circuits; Computer integrated manufacturing; Etching; Flexible manufacturing systems; Large scale integration; Logic; Manufacturing automation; Plasma applications; Plasma materials processing; Semiconductor device manufacture;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Semiconductor Manufacturing, 1993. International Symposium on
  • Conference_Location
    Austin, TX, USA
  • Type

    conf

  • DOI
    10.1109/ISSM.1993.671081
  • Filename
    671081
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=2874408