DocumentCode
2875245
Title
Compositional disordering of AlGaAs/GaAs superlattices by low temperature grown GaAs
Author
Tsang, J.S. ; Lee, C.P. ; Fan, J.C. ; Tsai, K.L. ; Chen, H.R.
Author_Institution
National Chiao Tung University
fYear
1994
fDate
1994
Firstpage
18216
Lastpage
19312
Keywords
Annealing; Furnaces; Gallium arsenide; Impurities; Mass spectroscopy; Molecular beam epitaxial growth; Photoluminescence; Substrates; Superlattices; Temperature;
fLanguage
English
Publisher
ieee
Conference_Titel
Electron Devices and Materials Symposium, 1994. EDMS 1994. 1994 International
Type
conf
DOI
10.1109/EDMS.1994.771307
Filename
771307
Link To Document