DocumentCode
2875291
Title
Proximity X-Ray Lithography Using a Droplet-Target Laser-Plasma Source
Author
Malmqvist, L. ; Rymell, L. ; Hertz, H.M.
fYear
1996
fDate
8-13 Sept. 1996
Firstpage
201
Lastpage
201
Keywords
Costs; Laser theory; Optimized production technology; Plasma applications; Plasma chemistry; Plasma waves; Plasma x-ray sources; Power lasers; X-ray lasers; X-ray lithography;
fLanguage
English
Publisher
ieee
Conference_Titel
Lasers and Electro-optics Europe, 1996. CLEO/Europe., Conference on
Conference_Location
Hamburg, Germany
Print_ISBN
0-7803-3169-9
Type
conf
DOI
10.1109/CLEOE.1996.562331
Filename
562331
Link To Document