Multi variation mapping for Dynamic Laser Stimulation analysis

Author

Kevin, Sanchez ; Perdu, Philippe

Author_Institution

DCT/AQ/LE, CNES, Toulouse, France

fYear

2011

fDate

4-7 July 2011

Firstpage

1

Lastpage

5

Abstract

Dynamic Laser Stimulation is now widely used for soft defect issues and is generally based on the study of device under test functionality (pass or fail). Automatic Test Equipments (ATE) are able to collect a lot of electrical parameters about device under test status but actually only the pass/fail is exploited and mapped has function of the laser beam position. Multi variation mapping (MVM) for Dynamic Laser Stimulation analysis gives the possibility to get all the data in same time than pass/fail and is able in one acquisition to give one mapping per data. Therefore MVM for Dynamic Laser Stimulation analysis offers the unique opportunity of collecting in one scan all the data necessary for a deep integrated circuit analysis.

Keywords

automatic test equipment; integrated circuit testing; laser beams; automatic test equipments; device under test functionality; dynamic laser stimulation; electrical parameters; integrated circuit analysis; laser beam position; multivariation mapping; soft defect; Current measurement; Failure analysis; Laser beams; Laser modes; Measurement by laser beam; Semiconductor device measurement; Universal Serial Bus;

fLanguage

English

Publisher

ieee

Conference_Titel

Physical and Failure Analysis of Integrated Circuits (IPFA), 2011 18th IEEE International Symposium on the

Conference_Location

Incheon

ISSN

1946-1542

Print_ISBN

978-1-4577-0159-7

Electronic_ISBN

1946-1542

Type

conf

DOI

10.1109/IPFA.2011.5992785

Filename

5992785