DocumentCode
288212
Title
Moving and flexible microstructures
Author
Dorey, Howard
fYear
1994
fDate
34408
Firstpage
42370
Lastpage
42371
Abstract
Microengineering is developing at a rate limited by the enormous amount of practical difficulties encountered. Vibrating elements made of pure silicon offer stabilities approaching one part in a million. This work presents some basic research into the lubrication of silicon surfaces
fLanguage
English
Publisher
iet
Conference_Titel
Moving and Flexing Microstructures - their Design, Modelling and Production, IEE Colloquium on
Conference_Location
London
Type
conf
Filename
369861
Link To Document