• DocumentCode
    2884783
  • Title

    Effect of Indium doping on the Gas sensing behavior of Zinc oxide films obtained by Chemical spray pyrolysis method

  • Author

    Nisha, R ; Madhusoodanan, K.N. ; Vimalkumar, T.V. ; Vijayakumar, K.P.

  • Author_Institution
    Department of Instrumentation, Cochin University of Science and Technology, India
  • fYear
    2012
  • fDate
    7-10 March 2012
  • Firstpage
    204
  • Lastpage
    207
  • Abstract
    NO2 gas Sensing characteristics of thin films of Zinc oxide obtained by spray pyrolysis were studied. The film thickness was about 550nm. The effect of indium doping on the sensor performance were also studied. The sensing behavior in the temperature range of 100–225°C was measured to find out the optimal working temperature.
  • Keywords
    NO2 gas sensing; ZnO film; chemical spray pyrolysis; indium doping;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Physics and Technology of Sensors (ISPTS), 2012 1st International Symposium on
  • Conference_Location
    Pune, India
  • Print_ISBN
    978-1-4673-1040-6
  • Type

    conf

  • DOI
    10.1109/ISPTS.2012.6260923
  • Filename
    6260923