DocumentCode
2884783
Title
Effect of Indium doping on the Gas sensing behavior of Zinc oxide films obtained by Chemical spray pyrolysis method
Author
Nisha, R ; Madhusoodanan, K.N. ; Vimalkumar, T.V. ; Vijayakumar, K.P.
Author_Institution
Department of Instrumentation, Cochin University of Science and Technology, India
fYear
2012
fDate
7-10 March 2012
Firstpage
204
Lastpage
207
Abstract
NO2 gas Sensing characteristics of thin films of Zinc oxide obtained by spray pyrolysis were studied. The film thickness was about 550nm. The effect of indium doping on the sensor performance were also studied. The sensing behavior in the temperature range of 100–225°C was measured to find out the optimal working temperature.
Keywords
NO2 gas sensing; ZnO film; chemical spray pyrolysis; indium doping;
fLanguage
English
Publisher
ieee
Conference_Titel
Physics and Technology of Sensors (ISPTS), 2012 1st International Symposium on
Conference_Location
Pune, India
Print_ISBN
978-1-4673-1040-6
Type
conf
DOI
10.1109/ISPTS.2012.6260923
Filename
6260923
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