• DocumentCode
    2898311
  • Title

    Counter streaming beams model in MICHELLE eBEAM

  • Author

    Ovtchinnikov, Serguei ; Cooke, Simon ; Mkrtchyan, Masis ; Shtokhamer, Roman ; Vlasov, Alexander ; Petillo, John ; Levush, Baruch

  • Author_Institution
    Sci. Applic. Int´´l Corp., Billerica, MA, USA
  • fYear
    2012
  • fDate
    24-26 April 2012
  • Firstpage
    199
  • Lastpage
    200
  • Abstract
    Simulation of counter streaming charged particle beams, where two beams are co-located in space while propagating in opposite directions, has many applications ranging from the lower current electron beam lithography regime to the higher current Free Electron Laser (FEL) regime. Modeling such counter streaming beams presents different computational challenges depending on the specific device being modeled. Applications of interest require in some cases the model of both global and stochastic space charge; the latter requires direct evaluation of Coulomb interactions. A new approach implemented in MICHELLE-eBEAM is designed to take advantage of the GPU hardware acceleration and novel algorithms to capture such inter-particle interactions efficiently. In this paper we report on our latest progress and show for a high current electron beam lithography application the achieved accuracy and performance of the new code.
  • Keywords
    electron beam lithography; free electron lasers; graphics processing units; space charge; Coulomb interaction; FEL regime; GPU hardware acceleration; MICHELLE eBEAM; counter streaming beams model; counter streaming charged particle beam; current electron beam lithography; free electron laser; global space charge; interparticle interaction; stochastic space charge; Accuracy; Computational modeling; Laser beams; Lithography; Particle beams; Radiation detectors; Weapons; Coulomb interaction; GPU; counter streaming; lithography; stochastic space charge;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Vacuum Electronics Conference (IVEC), 2012 IEEE Thirteenth International
  • Conference_Location
    Monterey, CA
  • Print_ISBN
    978-1-4673-0188-6
  • Electronic_ISBN
    978-1-4673-0187-9
  • Type

    conf

  • DOI
    10.1109/IVEC.2012.6262128
  • Filename
    6262128