• DocumentCode
    2898761
  • Title

    Electroless over pad metallization for high temperature interconnections

  • Author

    Qu, S. ; Pham, K. ; Nguyen, L. ; Prabhu, Akshata ; Poddar, A. ; Athavale, S. ; Xu, A. ; How, Y.C. ; Lee, C.S. ; Ooi, K.C.

  • Author_Institution
    Nat. Semicond., Santa Clara, CA, USA
  • fYear
    2010
  • fDate
    Nov. 30 2010-Dec. 2 2010
  • Firstpage
    1
  • Lastpage
    7
  • Abstract
    Electrolessly plated over pad metallization (OPM) was evaluated for high temperature gold wire bonding applications. Bonding strength, measured by wire bond bump shear test, of 4N gold wire on electroless OPMs, such as electroless nickel/immersion gold (ENIG), electroless nickel/electroless palladium (ENEP), and electroless nickel/electroless palladium/immersion gold (ENEPIG), was carefully evaluated before and after wire bond was subjected to various environmental stresses. Failure modes, besides bonding strength, were particularly examined for overall bonding quality assessment and OPM screening. Authors´ intensive work found that ENEPIG OPM had the highest bonding strength and consistent failure mode over the other two OPM options: ENIG and ENEP. Even after 3000 hours of 175°C high temperature storage life test, there is no sign of bonding strength degradation. Processes of ENIG, ENEP and ENEP1G OPMs were compared, in conjunction with pros and cons of each OPM choice. Plating imperfections, found in almost every ENEP1G OPM cross section, are also discussed in details.
  • Keywords
    environmental degradation; failure analysis; gold; integrated circuit metallisation; lead bonding; mechanical testing; remaining life assessment; shear strength; ENEPIG OPM; ENIG; OPM screening; bonding strength degradation; electroless OPM; electroless nickel/electroless palladium/immersion gold; electroless nickel/immersion gold; electroless over pad metallization; electrolessly plated over pad metallization; environmental stresses; failure modes; high temperature gold wire bonding applications; high temperature interconnections; high temperature storage life test; overall bonding quality assessment; plating imperfections; wire bond bump shear test; Aluminum; Gold; Nickel; Palladium; Reliability engineering; TV;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Electronic Manufacturing Technology Symposium (IEMT), 2010 34th IEEE/CPMT International
  • Conference_Location
    Melaka
  • ISSN
    1089-8190
  • Print_ISBN
    978-1-4244-8825-4
  • Type

    conf

  • DOI
    10.1109/IEMT.2010.5746709
  • Filename
    5746709