Development and application of a compact broadband laser-plasma EUV source

In this paper, we will report on the development of a compact broadband laser-plasma EUV source, which consists of a very small-sized diode-pumped Nd:YAG laser (1064 nm) with 20 Hz/20 mJ/8.5 ns and a cylindrical target with galvanic gold coating. The target will be rotated and translated, so that every shot hits a new part of the surface, allowing an operating time of 80 hours with one cylinder. The effect of gold debris particles on gold coated collector mirrors was also investigated. It turns out, that under suitable geometric conditions this debris will not deteriorate the reflectivity and focussing conditions of the mirror in a noticeable degree after hundreds of operating hours.