A micro-mechanical fresnel lens for spectral filtering

Author

Lacolle, Matthieu ; Sagberg, Håkon ; Lee, Daesung ; Solgaard, Olav ; Johansen, Ib-Rune ; Løvhaugen, Odd ; Sudhø, Aasmund

Author_Institution

Dept. of Phys., Oslo Univ.

fYear

2005

fDate

17-17 June 2005

Firstpage

572

Lastpage

572

Abstract

In this paper, there has been a recent interest for MEMS-based adjustable or re-configurable diffraction filters. Reconfigurable diffraction filters are well adapted to NIR spectroscopy, with applications such as identification of polymers and detection of carbon monoxide in air. A cost-effective implementation of a NIR spectrometer was proposed by Lovhaugen. The system uses a focusing static Diffractive Optical Element (DOE). The set-up minimizes the number of elements in the system, as no lens is needed

Keywords

Fresnel diffraction; diffractive optical elements; infrared spectroscopy; micro-optics; micromechanical devices; optical filters; optical focusing; optical polymers; DOE; MEMS; NIR spectroscopy; carbon monoxide detection; diffractive optical element; focusing; micro-mechanical Fresnel lens; polymers; reconfigurable diffraction filters; spectral filter; Chemical elements; Diffraction gratings; Etching; Lenses; Optical diffraction; Optical filters; Scanning electron microscopy; Silicon on insulator technology; Spectroscopy; Voltage;

fLanguage

English

Publisher

ieee

Conference_Titel

Lasers and Electro-Optics Europe, 2005. CLEO/Europe. 2005 Conference on

Conference_Location

Munich

Print_ISBN

0-7803-8974-3

Type

conf

DOI

10.1109/CLEOE.2005.1568349

Filename

1568349