Advanced SCR ESD protection circuits for CMOS/SOI nanotechnologies

Author

Mergens, Markus P J ; Marichal, Olivier ; Thijs, Steven ; Van Camp, Benjamin ; Russ, Christian C.

Author_Institution

Infineon Technol. AG, Munich

fYear

2005

fDate

21-21 Sept. 2005

Firstpage

481

Lastpage

488

Abstract

This paper reviews the application of SCR-based ESD protection circuits in advanced CMOS/SOI technologies. The devices are integrated in a flexible modular circuit design technique allowing for independent optimization of key characteristics. The IC application focus is on sensitive IOs, i.e. (ultra-)thin GOX input protection and robust output driver design using SCRs. Moreover, SCR transfer and integration into advanced SOI technologies is discussed. RF ESD principles are considered as well

Keywords

CMOS integrated circuits; electrostatic discharge; nanoelectronics; silicon-on-insulator; solid-state rectifiers; CMOS nanotechnology; RF ESD principles; SCR ESD protection circuits; SCR transfer; SOI nanotechnology; electrostatic discharge protection; modular circuit design technique; output driver design; ultrathin gate oxide input protection; Application specific integrated circuits; CMOS technology; Circuit synthesis; Design optimization; Driver circuits; Electrostatic discharge; Integrated circuit technology; Protection; Robustness; Thyristors;

fLanguage

English

Publisher

ieee

Conference_Titel

Custom Integrated Circuits Conference, 2005. Proceedings of the IEEE 2005

Conference_Location

San Jose, CA

Print_ISBN

0-7803-9023-7

Type

conf

DOI

10.1109/CICC.2005.1568712

Filename

1568712