• DocumentCode
    2913955
  • Title

    High-density 3D packaging technology for CCD micro-camera system module

  • Author

    Yamada, H. ; Togasaki, T. ; Kimura, M. ; Sudo, H.

  • Author_Institution
    Corp. R&D Center, Toshiba Corp., Kawasaki, Japan
  • fYear
    2001
  • fDate
    25-25 Jan. 2001
  • Firstpage
    14
  • Lastpage
    17
  • Abstract
    High-density three-dimensional (3D) packaging technology for a CCD micro-camera system module has been developed by applying high-density interconnection stack-unit modules that have fine-pitch flip-chip interconnections within copper-column-based solder bumps and high-aspect-ratio sidewall footprints for vertical interconnections. Copper-column-based solder bump design and underfill encapsulation resin characteristics were optimized to reduce the strain in the bump and to achieve fine-pitch flip-chip interconnection with high reliability. High-aspect-ratio sidewall footprints were realized by the copper-filled stacked vias at the edge of the module substrate. High-precision distribution of sidewall footprints was achieved by laminating the multiple stack-unit substrates simultaneously. The fabricated three-dimensional package has operated satisfactorily as the CCD imaging data transmission circuit module. The technology was confirmed to be effective for incorporating many devices of different sizes at far higher packaging density than it is possible to attain using conventional technology.
  • Keywords
    CCD image sensors; cameras; fine-pitch technology; flip-chip devices; packaging; CCD imaging data transmission circuit; CCD micro-camera system module; Cu; HDI stacked unit; copper column solder bump; copper via; fine-pitch flip-chip interconnection; high-aspect-ratio sidewall footprint; high-density three-dimensional packaging technology; laminated substrate; reliability; underfill encapsulation resin; vertical interconnection; Charge coupled devices; Data communication; Electronics packaging; Energy consumption; Integrated circuit interconnections; Large scale integration; Manufacturing; Multimedia systems; Signal generators; Synchronization;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Micro Electro Mechanical Systems, 2001. MEMS 2001. The 14th IEEE International Conference on
  • Conference_Location
    Interlaken, Switzerland
  • ISSN
    1084-6999
  • Print_ISBN
    0-7803-5998-4
  • Type

    conf

  • DOI
    10.1109/MEMSYS.2001.906467
  • Filename
    906467