Space and surface charge behavior analysis of plasma pre-processed dielectric thin films

Author

Takashima, Kazunori ; Oda, Tetsuji

Author_Institution

Dept. of Electr. Eng., Tokyo Univ., Japan

Volume

3

fYear

1997

fDate

5-9 Oct 1997

Firstpage

2052

Abstract

In order to study the space charge behavior in dielectric thin films, a space charge distribution measuring system based on a LIPP (laser induced pressure pulse) method was constructed. Pressure pulse was generated by irradiating the absorbent on a sample surface with mode-locked pico-second YAG laser to achieve good spatial resolution. From a LIPP response of a PVDF (polyvinylidene fluoride) piezoelectric thin film, in-depth profile of the system is estimated. For example, it was estimated to be about 2 μm for PTFE (polytetrafluoro ethylene) thin film. By using space charge density distribution measurement, space and surface charge behavior of the corona-charged PTFE thin film was studied. Effect of antistatic process using low pressure discharge plasma and charge elimination process dipping in city water was also studied. Plasma processing enhances the effect of charge elimination dipping in city water

Keywords

charge measurement; corona; laser beam applications; piezoelectric thin films; plasma applications; polymer films; solid lasers; space charge; surface charging; 2 mum; PTFE thin film; PVDF piezoelectric thin film; antistatic process; charge elimination process dipping; city water; corona-charged PTFE thin film; laser induced pressure pulse method; low pressure discharge plasma; mode-locked pico-second YAG laser; plasma pre-processed dielectric thin films; polytetrafluoro ethylene; polyvinylidene fluoride; space charge behavior analysis; space charge density distribution measurement; spatial resolution; surface charge behavior analysis; Charge measurement; Current measurement; Laser mode locking; Optical pulse generation; Piezoelectric films; Plasma density; Plasma materials processing; Plasma measurements; Pulse measurements; Space charge;

fLanguage

English

Publisher

ieee

Conference_Titel

Industry Applications Conference, 1997. Thirty-Second IAS Annual Meeting, IAS '97., Conference Record of the 1997 IEEE

Conference_Location

New Orleans, LA

ISSN

0197-2618

Print_ISBN

0-7803-4067-1

Type

conf

DOI

10.1109/IAS.1997.626350

Filename

626350