Polyimide as the pedestal of batch fabricated micro-ball lens and micro-mushroom array

Author

Yuh-Sheng Lin ; Cheng-Tang Pan ; Kun-Lung Lin ; Shih-Chou Chen ; Jauh-Jung Yang ; Jei-Pin Yang

Author_Institution

Ind. Technol. Res. Inst., Hsinchu, Taiwan

fYear

2001

fDate

25-25 Jan. 2001

Firstpage

337

Lastpage

340

Abstract

The paper presents an innovative process to fabricate micro-ball lenses and micro-mushroom arrays. The new batch fabrication idea is a simple process with one mask and easily integrated in the planar substrate. The integrated micro-ball lens is no longer a dream. With proper heat treatment of high aspect ratio photoresist on a polyimide pedestal, micro-ball lenses and micro-mushroom arrays are easily fabricated. The fabrication result shows that the reflowed shape depends on the diameter and height of the photoresist pattern. The theory, fabrication and result are discussed.

Keywords

batch processing (industrial); heat treatment; microlenses; optical arrays; optical polymers; photoresists; batch fabrication; heat treatment; micro opto electro mechanical systems; micro-ball lens; micro-mushroom array; photoresist; planar substrate; polyimide pedestal; Fabrication; Glass; Lenses; Microoptics; Microwave integrated circuits; Polyimides; Polymers; Resists; Surface tension; Temperature;

fLanguage

English

Publisher

ieee

Conference_Titel

Micro Electro Mechanical Systems, 2001. MEMS 2001. The 14th IEEE International Conference on

Conference_Location

Interlaken, Switzerland

ISSN

1084-6999

Print_ISBN

0-7803-5998-4

Type

conf

DOI

10.1109/MEMSYS.2001.906547

Filename

906547