DocumentCode
2915670
Title
Ciliary motion actuator using self-oscillating gel
Author
Tabata, O. ; Hirasawa, H. ; Aoki, S. ; Yoshida, R. ; Kokufuta, E.
Author_Institution
Ritsumeikan Univ., Kyoto, Japan
fYear
2001
fDate
25-25 Jan. 2001
Firstpage
405
Lastpage
408
Abstract
A ciliary motion actuator made of self-oscillating polymer gel has been demonstrated. The actuator was made of polymer gel and a micro projection array was formed on the surface. It was fabricated by moving mask deep X-ray lithography (M/sup 2/DXL) technique and micro molding technique. The polymer gel exhibited spontaneous swelling-deswelling oscillations and dynamic rhythm was created in the array structure. It was demonstrated that this oscillation propagated in the gel with projection array.
Keywords
X-ray lithography; gels; microactuators; moulding; swelling; array structure; ciliary motion actuator; dynamic rhythm; micro molding technique; micro projection array; moving mask deep X-ray lithography; self-oscillating polymer gel; spontaneous swelling-deswelling oscillations; Actuators; Chemicals; Fabrication; Frequency; Heart; Microactuators; Polymer gels; Pulse generation; Rhythm; X-ray lithography;
fLanguage
English
Publisher
ieee
Conference_Titel
Micro Electro Mechanical Systems, 2001. MEMS 2001. The 14th IEEE International Conference on
Conference_Location
Interlaken, Switzerland
ISSN
1084-6999
Print_ISBN
0-7803-5998-4
Type
conf
DOI
10.1109/MEMSYS.2001.906562
Filename
906562
Link To Document