DocumentCode
2916533
Title
Electrostatic impact-drive microactuator
Author
Mita, M. ; Arai, M. ; Tensaka, S. ; Kobayashi, D. ; Basset, Philippe ; Kaiser, A. ; Masquelier, P. ; Buchaillot, L. ; Collard, D. ; Fujita, H.
Author_Institution
Tokyo Univ., Japan
fYear
2001
fDate
25-25 Jan. 2001
Firstpage
590
Lastpage
593
Abstract
A fully packagable micromachined actuator was developed for generating precise but unlimited displacement. A suspended silicon mass is encapsulated between glass plates and driven by electrostatic force. By hitting a stopper, it generates impact force to drive the whole actuator in a small step (/spl sim/10 nm). It is a micromachined and electrostatic version of the impact-drive actuator.
Keywords
electrostatic actuators; elemental semiconductors; encapsulation; microactuators; micromachining; silicon; Si; electrostatic impact-drive microactuator; encapsulation; fully packagable micromachined actuator; glass plates; suspended silicon mass; Acceleration; Actuators; Electrodes; Electrostatics; Friction; Glass; Microactuators; Silicon; Suspensions; Voltage;
fLanguage
English
Publisher
ieee
Conference_Titel
Micro Electro Mechanical Systems, 2001. MEMS 2001. The 14th IEEE International Conference on
Conference_Location
Interlaken, Switzerland
ISSN
1084-6999
Print_ISBN
0-7803-5998-4
Type
conf
DOI
10.1109/MEMSYS.2001.906610
Filename
906610
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