Automatic model linking in the Semiconductor Workbench for Integrated Modeling

Software extensions to SEMATECH´s Semiconductor Workbench for Integrated Modeling (SWIM) are presented. The SWIM workbench lets modelers exchange data between factory models, using a comprehensive, standard data schema. The extensions presented here, collectively known as automatic model linking (AML), allow users to work in terms of factory questions instead of approaching SWIM with knowledge of which models to run. AML exposes how different models use subsets of the comprehensive schema. In addition, AML shows how models compare in which aspect of the factory they model. Finally, AML lets modelers specify factory questions in terms of controlled variables and desired responses