Modeling and validation of electrostatic actuation in aqueous ionic media

Operation of electrostatic actuators in liquid media has various proposed applications, especially in biological environments. We present circuit models based on electric double layer theories to estimate the frequency-dependent force response of electrostatic actuators in ionic media. This model is particularly useful for predicting the characteristic frequency required to operate the devices. Further, the impedance characteristics of test structures are measured and matched to determine the relevant circuit components. The values obtained from impedance and actuation experiments are compared with the predictions from theory to validate the models.