Toward an autonomous electrostatic micromotor: Integrated feedback control

The design, fabrication, and characterization of an electrostatic micromotor with an integrated feedback control system are reported. A photodiode-based position sensing mechanism has been designed and integrated in a linear micromotor supported on microball bearings. A programmable microcontroller together with integrated photodiodes has been used to create a feedback loop for controlled mechanical motion. Speed and position control have been demonstrated showing superior performance over open loop excitation. Autonomous decision making to overcome friction barriers and to provide continuous motion has been achieved through control algorithms. This system allows for the realization of smart micromachines capable of providing position control, increased speed, efficient and reliable operation.