DocumentCode
2919544
Title
Experiment on the Absolute Measurement of A Silicon Lattice Spacing at the NRLM
Author
Nakayama, K. ; Tanaka, M. ; Kuroda, K.
Author_Institution
National Research Laboratory of Metrology
fYear
1988
fDate
7-10 June 1988
Firstpage
424
Lastpage
425
Abstract
An improvement of the x-ray and optical interferometer system is in progress for the absolute determination of the silicon
fLanguage
English
Publisher
ieee
Conference_Titel
Precision Electromagnetic Measurements, 1988. CPEM 88 Digest. 1988 Conference on
Conference_Location
Ibaraki, Japan
Type
conf
DOI
10.1109/CPEM.1988.671382
Filename
671382
Link To Document