• DocumentCode
    2919544
  • Title

    Experiment on the Absolute Measurement of A Silicon Lattice Spacing at the NRLM

  • Author

    Nakayama, K. ; Tanaka, M. ; Kuroda, K.

  • Author_Institution
    National Research Laboratory of Metrology
  • fYear
    1988
  • fDate
    7-10 June 1988
  • Firstpage
    424
  • Lastpage
    425
  • Abstract
    An improvement of the x-ray and optical interferometer system is in progress for the absolute determination of the silicon
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Precision Electromagnetic Measurements, 1988. CPEM 88 Digest. 1988 Conference on
  • Conference_Location
    Ibaraki, Japan
  • Type

    conf

  • DOI
    10.1109/CPEM.1988.671382
  • Filename
    671382