DocumentCode
2919701
Title
Speed performance and control of a micromachined linear brownian motor
Author
Altintas, Ersin ; Sarajlic, Edin ; Böhringer, Karl F. ; Fujita, Hiroyuki
Author_Institution
Univ. of Tokyo, Tokyo
fYear
2008
fDate
13-17 Jan. 2008
Firstpage
673
Lastpage
676
Abstract
We report on fabrication and experimental characterization of a linear Brownian motor with a periodic 3-phase electrostatic rectification for unidirectional transport of nanobeads in microfluidic channels. The transport of the beads is performed in 1 mum deep, 2 mum wide PDMS microchannels, which constrain three-dimensional random motion of nanobeads into ID fluctuation, so-called tamed Brownian motion. 2 mum wide and 4 mum separated ITO electrodes are fabricated by lift-off process on a 24x36 mm2 coverglass. After planarization of the surface, a previously fabricated PDMS sheet with microchannels is aligned and sealed with the electrodes. Diluted fluorescent nanobead suspension, 1:1000 and 500 nm in diameter, is introduced and equilibrium of the flow is awaited. Experimental results reveal the influence of electrode spacing, switching sequence (excitation time and Brownian time or diffusion time) and viscosity on the transportation and speed performance of the motor. Average speed is dependent on the switching sequence and it peaks around the expected diffusion time of the particles between electrodes.
Keywords
Brownian motion; electrostatics; linear motors; machine control; microchannel flow; micromachining; micromotors; velocity control; ITO electrodes; PDMS microchannels; depth 1 mum; electrode spacing; fluorescent nanobead suspension; microfluidic channels; micromachined linear Brownian motor; periodic three-phase electrostatic rectification; size 2 mum; size 500 nm; surface planarization; switching sequence; three-dimensional random motion; unidirectional transport; Electrodes; Electrostatics; Fabrication; Fluctuations; Fluorescence; Indium tin oxide; Microchannel; Microfluidics; Micromotors; Planarization;
fLanguage
English
Publisher
ieee
Conference_Titel
Micro Electro Mechanical Systems, 2008. MEMS 2008. IEEE 21st International Conference on
Conference_Location
Tucson, AZ
ISSN
1084-6999
Print_ISBN
978-1-4244-1792-6
Electronic_ISBN
1084-6999
Type
conf
DOI
10.1109/MEMSYS.2008.4443746
Filename
4443746
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