MEMS optical tunneling structure for thermo-optic switching

Author

Zhu, W.M. ; Zhang, X.M. ; Zhong, T. ; Liu, A.Q.

Author_Institution

Nanyang Technol. Univ., Singapore

fYear

2008

fDate

13-17 Jan. 2008

Firstpage

782

Lastpage

785

Abstract

This paper presents a thermooptic switch based on the optical tunneling effect of a double optical barriers system. By introducing a new physical mechanism of the optical tunneling effect into micro-electro-mechanical systems (MEMS) technology, a switching contrast of more than 30 dB with a response time of less than 3 mus are obtained. Compared with the previously reported thermo-optic switches, this design requires very small change in refractive index for switching (Deltan ap 10^-4), which is only 1/10 of the typical requirement. It has fast tuning speed and low power consumption.

Keywords

micro-optics; microswitches; optical design techniques; optical switches; optical tuning; refractive index; thermo-optical devices; tunnelling; MEMS optical tunneling structure; double optical barriers system; fast tuning speed; low power consumption; microelectro-mechanical systems technology; physical mechanism; refractive index; switching contrast; thermo-optic switch design; Delay; Energy consumption; Microelectromechanical systems; Micromechanical devices; Optical refraction; Optical switches; Optical tuning; Optical variables control; Refractive index; Tunneling;

fLanguage

English

Publisher

ieee

Conference_Titel

Micro Electro Mechanical Systems, 2008. MEMS 2008. IEEE 21st International Conference on

Conference_Location

Tucson, AZ

ISSN

1084-6999

Print_ISBN

978-1-4244-1792-6

Electronic_ISBN

1084-6999

Type

conf

DOI

10.1109/MEMSYS.2008.4443773

Filename

4443773