Microfabricated endoscopic probe integrated MEMS micromirror for optical coherence tomography bioimaging

Author

Wang, Ming-Fang ; Xu, Yingshun ; Prem, C.S. ; Chen, Kelvin Wei Sheng ; Xie, Jin ; Mu, Xiaojing ; Tan, Chee Wei ; Yu, Aibin ; Feng, Hanhua

Author_Institution

Inst. of Microelectron., Singapore, Singapore

fYear

2010

fDate

Aug. 31 2010-Sept. 4 2010

Firstpage

57

Lastpage

60

Abstract

In this paper, we present a miniaturized endoscopic probe, consisted of MEMS micromirror, silicon optical bench (SiOB), grade index (GRIN) lens, single mode optical fiber (SMF) and transparent housing, for optical coherence tomography (OCT) bioimaging. Due to the use of the MEMS micromirror, the endoscopic OCT system is highly suitable for non-invasive imaging diagnosis of a wide variety of inner organs. The probe engineering and proof of concept were demonstrated by obtaining the two-dimensional OCT images with a cover slide and an onion used as standard samples and the axial resolution was around 10 μm.

Keywords

bioMEMS; endoscopes; gradient index optics; microlenses; micromirrors; optical fibres; optical tomography; GRIN lens; OCT bioimaging; SiOB; endoscopic probe integrated MEMS micromirror; gradient index lens; microfabricated MEMS micromirror; miniaturized endoscopic probe; noninvasive imaging diagnosis; optical coherence tomography; silicon optical bench; single mode optical fiber; Biomedical optical imaging; Micromechanical devices; Micromirrors; Optical fibers; Optical imaging; Probes; Endoscopes; Equipment Design; Micro-Electrical-Mechanical Systems; Silicon; Tomography, Optical Coherence;

fLanguage

English

Publisher

ieee

Conference_Titel

Engineering in Medicine and Biology Society (EMBC), 2010 Annual International Conference of the IEEE

Conference_Location

Buenos Aires

ISSN

1557-170X

Print_ISBN

978-1-4244-4123-5

Type

conf

DOI

10.1109/IEMBS.2010.5626269

Filename

5626269