UV laser excitation of broadband surface acoustic wave pulses in silicon near the ablation threshold

Author

Kolomenskii, A.A. ; Hess, P.

Volume

2

fYear

1994

fDate

Oct. 31 1994-Nov. 3 1994

Firstpage

651

Abstract

The excitation of Rayleigh-type Surface Acoustic Waves (SAW) excited by nanosecond laser pulses at the wavelength of 355 nm is investigated. The dependence of SAW pulse amplitude on laser fluence is measured. The special features connected with surface melting and transition from thermoelastic to ablative excitation mechanism are studied. The ablation threshold is determined experimentally by changes in the SAW signal for successive laser shots on the same spot. It is shown that for the efficient repetitive excitation of broadband SAW pulses on the same spot laser intensities somewhat below the ablation threshold are the most appropriate

Keywords

Rayleigh waves; acoustic materials; elemental semiconductors; laser ablation; laser beam effects; melting; silicon; 355 nm; Rayleigh-type SAW; Si; UV laser excitation; ablation threshold; ablative excitation mechanism; broadband SAW pulses; broadband surface acoustic wave pulses; efficient repetitive excitation; laser fluence; laser intensities; nanosecond laser pulses; surface melting; Ablation; Laser radiation effects; Silicon materials/devices; Surface acoustic wave materials; Surface acoustic waves;

fLanguage

English

Publisher

ieee

Conference_Titel

Ultrasonics Symposium, 1994. Proceedings., 1994 IEEE

Conference_Location

Cannes, France

Print_ISBN

0-7803-2012-3

Type

conf

DOI

10.1109/ULTSYM.1994.401730

Filename

401730