DocumentCode
2922144
Title
Scheduling for Backend Manufacturing with SPTB Heuristic
Author
Mohile, M.G.
Author_Institution
Qimonda NA Corp., Sandston
fYear
2007
fDate
11-12 June 2007
Firstpage
377
Lastpage
383
Abstract
In this paper, we address a mixed-model flow shop scheduling problem that is encountered in the Backend of a semiconductor fabrication facility. The problem is to determine both the production batch sizes of different products (models) and the sequence in which to release them for processing in the Backend facility so as to minimize average cycle time.
Keywords
integrated circuit manufacture; scheduling; SPTB heuristic; backend manufacturing; mixed-model flow shop scheduling problem; semiconductor fabrication facility; Fabrication; Job shop scheduling; Manufacturing industries; Production facilities; Pulp manufacturing; Semiconductor device manufacture; Systems engineering and theory; Textile industry; Time measurement; Virtual manufacturing; engineering; manufacturing; manufacturing planning; manufacturing scheduling; modeling; optimization methods; production management; scheduling; systems engineering;
fLanguage
English
Publisher
ieee
Conference_Titel
Advanced Semiconductor Manufacturing Conference, 2007. ASMC 2007. IEEE/SEMI
Conference_Location
Stresa
Print_ISBN
1-4244-0652-8
Electronic_ISBN
1-4244-0653-6
Type
conf
DOI
10.1109/ASMC.2007.375067
Filename
4259233
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