Micromachined thermoelectrically driven cantilever structures for fluid jet deflection

Author

Döring, C. ; Grauer, T. ; Marek, J. ; Mettner, M.S. ; Trah, H.P. ; Willmann, M.

Author_Institution

Robert Bosch GmbH, Stuttgart, Germany

fYear

1992

fDate

4-7 Feb 1992

Firstpage

12

Lastpage

18

Abstract

The design, fabrication, and performance of bimorph cantilever structures for direction control of laminar jet flow are reported. The fabrication process comprises standard IC technologies and additional silicon micromachining techniques. The design parameters for the structures are obtained using analytical approximations and numerical simulations. Forced convection as the decisive cooling mechanism proves to be very effective, resulting in an excellent dynamic response of the thermoelectrically activated structures. Experimental testing confirmed the predicted stationary and transient behavior of 1-mm-long and 1-mm-wide actuators, which are able to control hydraulic power at pressure levels of up to 4 bar, flow rates of up to 150 ml/min, and time constants of about 1 ms

Keywords

electric actuators; flow control; micromechanical devices; silicon; thermoelectric devices; valves; Si micromachining; bimorph cantilever structures; design parameters; direction control; dynamic response; laminar jet flow; micromachining techniques; microvalves; numerical simulations; stationary behavior; thermoelectrically activated structures; transient behavior; Actuators; Aluminum; Cooling; Fabrication; Fluid flow control; Heating; Pressure control; Resistors; Silicon; Thermoelectricity;

fLanguage

English

Publisher

ieee

Conference_Titel

Micro Electro Mechanical Systems, 1992, MEMS '92, Proceedings. An Investigation of Micro Structures, Sensors, Actuators, Machines and Robot. IEEE

Conference_Location

Travemunde

Print_ISBN

0-7803-0497-7

Type

conf

DOI

10.1109/MEMSYS.1992.187683

Filename

187683