Microelectromechanical filters for signal processing

Author

Lin, Li-Chiun ; Nguyen, Clark T.-C ; How, Roger T. ; Pisano, Albert P.

Author_Institution

California Univ., Berkeley, CA, USA

fYear

1992

fDate

4-7 Feb 1992

Firstpage

226

Lastpage

231

Abstract

Microelectromechanical (MEM) filters based on coupled, lateral microresonators are demonstrated. This class of MEM systems has potential signal-processing applications for filters which require narrow bandwidth (high Q), good signal-to-noise ratio (SNR) and stable temperature and aging characteristics. Both series and parallel filters were fabricated and tested using an off-chip modulation technique. The frequency range of these filters is from approximately 5 kHz to on the order of 1 MHz, for polysilicon microstructures with suspension beams having a 2-μm-square cross section. A series-coupled resonator pair, designed for operation at atmospheric pressure, has a measured center frequency of 18.7 kHz and a bandwidth of 1.2 kHz

Keywords

Q-factor; band-pass filters; electromechanical filters; filtering and prediction theory; mechatronics; micromechanical devices; 1.2 kHz; 2 micron; 5 to 1000 kHz; MEMS; SNR; aging characteristics; atmospheric pressure; bandwidth; center frequency; frequency range; high Q; microelectromechanical filters; microelectromechanical systems; microresonators; narrow bandwidth; off-chip modulation; parallel filters; polysilicon microstructures; series filters; series-coupled resonator pair; signal processing; signal-to-noise ratio; stable temperature characteristics; suspension beams; Aging; Bandwidth; Frequency; Microcavities; Microstructure; Resonator filters; Signal processing; Signal to noise ratio; Temperature; Testing;

fLanguage

English

Publisher

ieee

Conference_Titel

Micro Electro Mechanical Systems, 1992, MEMS '92, Proceedings. An Investigation of Micro Structures, Sensors, Actuators, Machines and Robot. IEEE

Conference_Location

Travemunde

Print_ISBN

0-7803-0497-7

Type

conf

DOI

10.1109/MEMSYS.1992.187722

Filename

187722