DocumentCode
2928354
Title
Polarization-Shifting Profilometer
Author
Teng, Hui-Kang ; Lang, Kuo-Chen ; Yen, Chun-Chen
Author_Institution
Electrical Engineering Department, Nan-Kai Institute of Technology, Nan-tou, Taiwan, ROC
fYear
2005
fDate
30-02 Aug. 2005
Firstpage
1699
Lastpage
1701
Abstract
A high sensitive Michelson interferometer with polarization shifting approach is proposed to determine the surface profile of optical devices with real time capability. The depth resolution in nanometer range and the lateral resolution smaller than 3 micrometer is demonstrated experimentally.
Keywords
Atomic force microscopy; Azimuth; Laser beams; Optical devices; Optical filters; Optical interferometry; Optical polarization; Optical surface waves; Phase shifting interferometry; Scanning electron microscopy;
fLanguage
English
Publisher
ieee
Conference_Titel
Lasers and Electro-Optics, 2005. CLEO/Pacific Rim 2005. Pacific Rim Conference on
Print_ISBN
0-7803-9242-6
Type
conf
DOI
10.1109/CLEOPR.2005.1569860
Filename
1569860
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