Rigorous analysis of the characteristic impedance in conductor-backed miniature coplanar waveguides considering multiple layers of lossy and finite thickness metal

The authors present a complete investigation of realistic conductor-backed miniature coplanar waveguides based on GaAs and alumina substrates. A self-consistent approach is used together with the method of lines to determine characteristic impedances, losses and propagation constants. This analysis is general and includes not only the finite thickness and conductivity of metallization but also the effect of first and second metallic layers and the via-hole location. Results are compared with those obtained with the mode-matching method and published measured data.<>