DocumentCode
2930338
Title
Laser micromachining of transparent glasses and aluminum with ps-pulse bursts at 1054 nm
Author
Herman, P.R. ; Lapczyna, M. ; Breitling, D. ; Schittenhelm, H. ; Tan, H.W. ; Kerachian, Y. ; Marjoribanks, R.S.
Author_Institution
Dept. of Electr. & Comput. Eng., Toronto Univ., Ont., Canada
fYear
2000
fDate
7-12 May 2000
Firstpage
580
Abstract
Summary form only given. This paper compares the micromachining of transparent glasses and aluminum foils with an ultrahigh repetition rate (133 MHz) burst of picosecond pulses at /spl lambda/=1054 nm. The material selection presents interesting contrasts in micro-via formation for brittle and ductile material classes. Fluences were applied in the range tens of J/cm/sup 2/ and up to 10 kJ/cm/sup 2/, and compared with single 1.2-ps pulse micromaching.
Keywords
aluminium; foils; high-speed optical techniques; laser ablation; laser beam etching; laser beam machining; micromachining; optical glass; 1054 nm; Al; aluminum foils; laser ablation; laser micromachining; micro-via formation; picosecond pulses; plume absorption effects; rapid etching rates; transparent glasses; ultrahigh repetition rate burst; Aluminum; Glass; Laser ablation; Micromachining; Steel;
fLanguage
English
Publisher
ieee
Conference_Titel
Lasers and Electro-Optics, 2000. (CLEO 2000). Conference on
Conference_Location
San Francisco, CA, USA
Print_ISBN
1-55752-634-6
Type
conf
DOI
10.1109/CLEO.2000.907417
Filename
907417
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