Session 28: Displays, sensors, and MEMS - MEMS actuators and resonators

This session covers optical and acoustical actuators, as well as the latest developments in the field of MEMS resonators and oscillators. The first half of the session deals with a state-of-the-art, CMOS based, large area micro-mirror array with high reliability, presented by IMEC. The next paper, by Tokyo University, describes a novel broadband sound emitting device for digital acoustic applications. The second half of the session covers progress in the field of mechanical resonators for RF filtering and timing reference. The first and second papers describe MEMS resonators using novel “transistor-like” transduction schemes and are presented by EPFL and NXP, respectively. The paper of Stanford University explains about the critical topic of temperature drift reduction of MEMS resonators. A record high frequency oscillator is presented by Georgia Institute of Technology. Finally, a novel manufacturing technique for a lithium niobate resonator is presented by SOITEC.