Surface-micromachined 2D optical scanners with high-porformance single-crystalline silicon micromirrors

Author

Su, G.-D.J. ; Hung Nguyen ; Paterson, P. ; Toshiyoshi, H. ; Wu, M.C.

Author_Institution

University of California

fYear

2000

fDate

7-12 May 2000

Firstpage

694

Lastpage

695

Keywords

Actuators; Crystallization; Micromechanical devices; Micromirrors; Mirrors; Optical films; Optical interferometry; Rough surfaces; Surface roughness;

fLanguage

English

Publisher

ieee

Conference_Titel

Lasers and Electro-Optics, 2000. (CLEO 2000). Conference on

Conference_Location

San Francisco, CA, USA

Print_ISBN

1-55752-634-6

Type

DOI

10.1109/CLEO.2000.907509

Filename

907509

Link To Document