Transport coefficients of high temperature CF4, C2F6, and C3F8 as candidate of SF6

The transport properties including electron diffusion coefficient, viscosity, thermal conductivity, and electrical conductivity of CF₄, C₂F₆, and C₃F₈ plasmas are obtained by using the Chapman-Enskog method expanded up to the third-order approximation (second-order for viscosity). The most recent data on potential interactions and elastic differential cross sections for interacting particles were utilized. The calculations, which assume local thermodynamic equilibrium, are performed at atmospheric pressure in the temperature range from 300 to 30 000 K. Our results can provide reliable reference data for the further simulation to study the relevant plasmas behavior.