DocumentCode
2944058
Title
Advanced simulation framework for AMHS
Author
Kondo, Hiroshi
Author_Institution
Asyst Shinko Inc., Ise
fYear
2007
fDate
15-17 Oct. 2007
Firstpage
1
Lastpage
4
Abstract
AMHS (automated material handling system) vendors are being expected not only to offer transport capabilities but also to guarantee its contribution to entire fab productivities. One of essential techniques for realizing this is estimation with using simulation studies prior to installation of AMHS into a fab. However traditional framework of AMHS simulation cannot enable to estimate entire fab productivities. This paper describes a new simulation framework for estimation of entire fab productivities, which describes what should be modeled and how they should be modeled.
Keywords
materials handling; AMHS; advanced simulation framework; automated material handling system; fab productivities; fabrication productivity; transport capabilities; Buffer storage; Frequency; Materials handling; Position measurement; Production systems; Productivity; Queueing analysis;
fLanguage
English
Publisher
ieee
Conference_Titel
Semiconductor Manufacturing, 2007. ISSM 2007. International Symposium on
Conference_Location
Santa Clara, CA
ISSN
1523-553X
Print_ISBN
978-1-4244-1142-9
Electronic_ISBN
1523-553X
Type
conf
DOI
10.1109/ISSM.2007.4446802
Filename
4446802
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