DocumentCode
2944225
Title
The methods of data collection and tool processing time estimation in lot processing
Author
Hosoe, Hisashi ; Knanamori, Nobuo ; Yoshida, Kouhei
Author_Institution
Matsushita Electr. Ind. Co., Ltd., Uozu
fYear
2007
fDate
15-17 Oct. 2007
Firstpage
1
Lastpage
4
Abstract
This article explains a new method for estimating tool processing time with high accuracy by interrelating tool processing model, tool processing time classification and event data. Tool processing time data with high accuracy is applied to the production scheduler, which enables making a highly-accurate operation plan. This approach also enables an analysis of tool setup time (B value).
Keywords
machine tools; planning; production control; semiconductor device manufacture; data collection; lot processing; operation plan; production scheduling; semiconductor manufacturing; tool processing time classification; tool processing time estimation; tool setup time; Cleaning; Manufacturing industries; Manufacturing processes; Paper technology; Production; Pulp manufacturing; Semiconductor device manufacture; Toy industry; Toy manufacturing industry; Virtual manufacturing;
fLanguage
English
Publisher
ieee
Conference_Titel
Semiconductor Manufacturing, 2007. ISSM 2007. International Symposium on
Conference_Location
Santa Clara, CA
ISSN
1523-553X
Print_ISBN
978-1-4244-1142-9
Electronic_ISBN
1523-553X
Type
conf
DOI
10.1109/ISSM.2007.4446810
Filename
4446810
Link To Document