Multipactor Coating for Sapphire RF Windows Using Remote Plasma-Assisted Deposition

Author

Ives, R.L. ; Zeller, D. ; Lucovsky, G. ; Schamiloglu, E. ; Marsden, D. ; Collins, G. ; Nichols, K. ; Karimov, R.

Author_Institution

Calabazas Creek Res. Inc., San Mateo, CA, USA

Volume

43

Issue

8

fYear

2015

fDate

Aug. 2015

Firstpage

2571

Lastpage

2580

Abstract

Traditional application of multipactor coatings applied with sputtering techniques to high-power RF windows typically performs well when applied to sintered powder ceramics. Unfortunately, sputtered coatings do not adhere well to crystal materials, such as sapphire. This publication describes a plasma-assisted process that molecularly bonds the multipactor coating to the base window material. The performance was verified by measuring secondary electron emission yield and operating the window at high power. The coating process and performance are presented.

Keywords

bonds (chemical); microwave switches; plasma deposited coatings; plasma deposition; sapphire; secondary electron emission; sputter deposition; sputtered coatings; Al₂O₃; base window material; crystal materials; high-power RF windows; molecular bonds; multipactor coating; remote plasma-assisted deposition; sapphire RF windows; secondary electron emission yield; sintered powder ceramics; sputtered coatings; Bonding; Coatings; Nitrogen; Plasmas; Substrates; Surface treatment; Tin; High-power RF; RF transmission; RF windows; RF windows.; klystron; multipactor;

fLanguage

English

Journal_Title

Plasma Science, IEEE Transactions on

Publisher

ieee

ISSN

0093-3813

Type

jour

DOI

10.1109/TPS.2015.2450678

Filename

7174521