Automatic assembly of quartz tuning fork and microcantilever

Author

Cheng, Chiao-Hua ; Chen, Jian-Hua ; Shieh, Jen-Yu ; Hung, Shao-Kang

Author_Institution

Dept. of Mech. Eng., Nat. Chiao Tung Univ., Hsinchu, Taiwan

fYear

2012

fDate

11-14 July 2012

Firstpage

580

Lastpage

585

Abstract

Conventional atomic force microscopes (AFMs) detect microcantilever deflection using an optical lever system. However, the complex mechanism of the optical lever system and the alignment of the laser spot on the microcantilever prevent such AFM systems from scanning large samples. AFM systems using a quartz tuning fork (QTF) as a force sensor have been proven feasible, and enhance compactness of the AFM system. This paper presents the automatic assembly of the QTF sensor and the microcantilever of commercial AFM probe using a visual servo method.

Keywords

atomic force microscopy; cantilevers; force sensors; micromechanical devices; quartz; vibrations; visual servoing; AFM system; QTF sensor; atomic force microscopes; automatic quartz tuning fork assembly; complex mechanism; force sensor; laser spot; microcantilever; microcantilever deflection detect; optical lever system; visual servo method; Assembly; Microscopy; Optical imaging; Optical microscopy; Probes; Real time systems; Visualization;

fLanguage

English

Publisher

ieee

Conference_Titel

Advanced Intelligent Mechatronics (AIM), 2012 IEEE/ASME International Conference on

Conference_Location

Kachsiung

ISSN

2159-6247

Print_ISBN

978-1-4673-2575-2

Type

conf

DOI

10.1109/AIM.2012.6266038

Filename

6266038