Low loss switchable coupled resonator bandpass filter

Author

Ong, Cen Yen ; Okoniewski, Michal

Author_Institution

Department of Electrical and Computer Engineering, University of Calgary, Alberta, Canada T2N 1N4

fYear

2008

fDate

15-20 June 2008

Firstpage

137

Lastpage

140

Abstract

A compact four-resonator microwave bandpass filter is presented. The filter frequency response is switched using electrostatically actuated MEMS cantilever capacitive switches. The filter is fabricated in a custom fabrication process with high resistivity chrome silicide bias lines. Measured frequency response of the filter switches from 16.025 to 13.675 GHz with insertion losses of 0.6 and 1.3 dB respectively. To the best of our knowledge, the filter exhibits the lowest insertion losses among MEMS-tunable microwave filters reported to date.

Keywords

band-pass filters; coupled circuits; frequency response; micromechanical devices; microstrip filters; microwave filters; resonator filters; switched capacitor filters; electrostatic actuated MEMS cantilever capacitive switches; four-resonator microwave bandpass filter; frequency response; high resistivity chrome silicide bias lines; insertion loss; low loss switchable coupled filter fabrication; Band pass filters; Conductivity; Fabrication; Frequency response; Insertion loss; Micromechanical devices; Microwave filters; Resonator filters; Silicides; Switches; Microelectromechanical devices; bandpass filters; coupling circuits; micromachining; microstrip resonators;

fLanguage

English

Publisher

ieee

Conference_Titel

Microwave Symposium Digest, 2008 IEEE MTT-S International

Conference_Location

Atlanta, GA

ISSN

0149-645X

Print_ISBN

978-1-4244-1780-3

Electronic_ISBN

0149-645X

Type

conf

DOI

10.1109/MWSYM.2008.4633122

Filename

4633122