• DocumentCode
    2946960
  • Title

    Magnetometry methods for thin film edge property measurements

  • Author

    Maranville, B.B. ; McMichael, R.D. ; Ross, C.A. ; Cheng, J.Y. ; Dennis, C.L.

  • Author_Institution
    NIST, Gaithersburg
  • fYear
    2006
  • fDate
    8-12 May 2006
  • Firstpage
    757
  • Lastpage
    757
  • Abstract
    We describe two techniques in this paper that use vector magnetometry to determine the straightness and the edge characteristics of arrays of long, straight, thin-film stripes. A variety of measurement techniques are available for characterizing bulk materials, thin films and even thin film interfaces, but few techniques are available for characterization of thin film edges. The magnetic properties of edges are important because they can determine the behavior of thin film devices. In very small patterned elements, the entire film is coupled to the edge by exchange and magnetostatic effects, and in larger elements, reversal often nucleates at the edge.
  • Keywords
    magnetometers; magnetostatics; thin films; edge straightness; magnetostatic effects; thin film edge property measurements; thin-film stripes; vector magnetometry; Magnetic field measurement; Magnetic properties; Magnetic switching; Magnetostatics; Materials science and technology; Micromagnetics; Plasma measurements; Saturation magnetization; Transistors; Vibration measurement;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Magnetics Conference, 2006. INTERMAG 2006. IEEE International
  • Conference_Location
    San Diego, CA
  • Print_ISBN
    1-4244-1479-2
  • Type

    conf

  • DOI
    10.1109/INTMAG.2006.376481
  • Filename
    4262190