DocumentCode
2946960
Title
Magnetometry methods for thin film edge property measurements
Author
Maranville, B.B. ; McMichael, R.D. ; Ross, C.A. ; Cheng, J.Y. ; Dennis, C.L.
Author_Institution
NIST, Gaithersburg
fYear
2006
fDate
8-12 May 2006
Firstpage
757
Lastpage
757
Abstract
We describe two techniques in this paper that use vector magnetometry to determine the straightness and the edge characteristics of arrays of long, straight, thin-film stripes. A variety of measurement techniques are available for characterizing bulk materials, thin films and even thin film interfaces, but few techniques are available for characterization of thin film edges. The magnetic properties of edges are important because they can determine the behavior of thin film devices. In very small patterned elements, the entire film is coupled to the edge by exchange and magnetostatic effects, and in larger elements, reversal often nucleates at the edge.
Keywords
magnetometers; magnetostatics; thin films; edge straightness; magnetostatic effects; thin film edge property measurements; thin-film stripes; vector magnetometry; Magnetic field measurement; Magnetic properties; Magnetic switching; Magnetostatics; Materials science and technology; Micromagnetics; Plasma measurements; Saturation magnetization; Transistors; Vibration measurement;
fLanguage
English
Publisher
ieee
Conference_Titel
Magnetics Conference, 2006. INTERMAG 2006. IEEE International
Conference_Location
San Diego, CA
Print_ISBN
1-4244-1479-2
Type
conf
DOI
10.1109/INTMAG.2006.376481
Filename
4262190
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