A novel magnetic-catalytic CMOS MEMS compatible gas sensor with ultra low power consumption

Author

Chih-Jen Cheng ; Chih-Hsiung Shen ; Shu-Jung Chen

Author_Institution

Dept. of Mechatron. Eng., Nat. Changhua Univ. of Educ., Changhua, Taiwan

fYear

2012

fDate

28-31 Oct. 2012

Firstpage

1

Lastpage

4

Abstract

Beyond the conventional chemical sensors with heating power, we proposed a total new magnetic-catalytic sensing mechanism without heating which includes the original sensing material and also magnetic-catalytic with even higher sensitivity than before. A magnetic material in sol-gel method and a prepared solution of sol-gel SnO₂ is mixed at SnO₂ : Fe₃O₄ = 3 : 1. The samples with several pH conditions were under test and verified inside a CO gas chamber with solenoidal coils. The sensitivity of proposed monoxide sensor reaches 0.3416%/ppm under 18.2 Gauss without heating which shows applicable for an ultra low power CO sensor with high sensitivity.

Keywords

CMOS integrated circuits; carbon compounds; catalysts; chemical sensors; gas sensors; iron compounds; magnetic materials; microsensors; semiconductor materials; sol-gel processing; solenoids; tin compounds; CO; SnO₂-Fe₃O₄; chemical sensor; gas chamber; gas sensor; magnetic catalytic CMOS MEMS sensor; magnetic material; monoxide sensor; sensing material; sol-gel method; solenoidal coil; Electrodes; Etching; Gas detectors; Materials; Metals; Sensitivity; CMOS; Fe3O4; Gas sensor; MEMS; Magnetic-Catalyst; SnO2;

fLanguage

English

Publisher

ieee

Conference_Titel

Sensors, 2012 IEEE

Conference_Location

Taipei

ISSN

1930-0395

Print_ISBN

978-1-4577-1766-6

Electronic_ISBN

1930-0395

Type

conf

DOI

10.1109/ICSENS.2012.6411302

Filename

6411302