DocumentCode
2953655
Title
Heater power and thermal gyroscope sensitivity
Author
Zarei, Niloofar ; Leung, Alice ; Jones, John
fYear
2012
fDate
28-31 Oct. 2012
Firstpage
1
Lastpage
4
Abstract
A micromachined gyroscope has been designed that measures rotation through the deflection of an oscillating stream of heated gas and its detection by symmetrically placed thermal sensors. Simulations of the physics of this device and experimental setup are used to investigate the impact of heater power on gyroscope sensitivity.
Keywords
gyroscopes; micromachining; microsensors; rotation measurement; temperature measurement; temperature sensors; heated gas; heater power; micromachined gyroscope; oscillating stream deflection; rotation measurement; symmetrically placed thermal sensors; thermal gyroscope sensitivity; Force; Gyroscopes; Heating; Mathematical model; Micromechanical devices; Sensitivity; Temperature sensors;
fLanguage
English
Publisher
ieee
Conference_Titel
Sensors, 2012 IEEE
Conference_Location
Taipei
ISSN
1930-0395
Print_ISBN
978-1-4577-1766-6
Electronic_ISBN
1930-0395
Type
conf
DOI
10.1109/ICSENS.2012.6411580
Filename
6411580
Link To Document