Elastomeric molding, stamping and near-field photolithographic methods for integrated optics and electronics

Summary form only given. Our recent research focuses on the development and use of rubber stamping (microcontact printing-/spl mu/CP), optical near-field methods that use conformable photomasks, and molding techniques that rely on elastomeric transfer elements. We explore, in particular, their applicability to the fabrication of certain systems in integrated optics and organic electronics. In this talk, I provide an overview of these soft lithographic techniques by highlighting their advantages and disadvantages compared to more established methods. The fidelity of the molding procedures are demonstrated through the fabrication of working plastic lasers that use molded distributed feedback (DFB), distributed Bragg reflector (DBR), and photonic crystal resonators with features as small as 100 nm. photolithographic methods.