• DocumentCode
    2956821
  • Title

    AlGaAs QPM waveguides fabricated by GaAs/Ge/GaAs [100] sublattice reversal epitaxy

  • Author

    Koh, S. ; Kondo, T. ; Shiraki, Y. ; Ito, R.

  • Author_Institution
    Dept. of Appl. Phys., Tokyo Univ., Japan
  • fYear
    2000
  • fDate
    10-15 Sept. 2000
  • Abstract
    Summary form only given. Periodically domain-inverted GaAs crystals for quasi phase matched (QPM) devices have attract much attention because the large optical nonlinearity of GaAs crystals, e.g. d/sub 35/(GaAs)=170 pm at 1.064 /spl mu/m, will offer high conversion efficiency. Periodically domain-inverted AlGaAs waveguides based on wafer bonding followed by overgrowth have been reported. We have proposed and demonstrated an alternative way, sublattice reversal epitaxy, to fabricate domain-inverted structure in the GaAs/Si/GaAs [100] system. Much higher qualities of domain-inverted GaAs epitaxial films be grown by sublattice reversal epitaxy in the lattice-matched GaAs/Ge/GeAs [100] system and GaAs overgrowth on the periodically patterned template allows us to attain periodical domain inversion in GaAs crystals.
  • Keywords
    III-V semiconductors; aluminium compounds; domains; gallium arsenide; molecular beam epitaxial growth; optical fabrication; optical harmonic generation; optical waveguides; ridge waveguides; wafer bonding; 1.064 mum; AlGaAs; GaAs crystals; GaAs epitaxial films; GaAs overgrowth; GaAs-Ge-GaAs; GaAs/Ge/GaAs [100] sublattice reversal epitaxy; conversion efficiency; domain-inverted; domain-inverted structure; fabrication; optical nonlinearity; overgrowth; periodical domain inversion; periodically domain-inverted AlGaAs waveguides; periodically domain-inverted GaAs crystals; periodically patterned template; quasi phase matched devices; quasi-phase matched waveguides; sublattice reversal epitaxy; wafer bonding; Epitaxial growth; Gallium arsenide; Lead compounds; MMICs; Microscopy; Reflection; Semiconductor materials; Substrates; Tensile stress;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Lasers and Electro-Optics Europe, 2000. Conference Digest. 2000 Conference on
  • Conference_Location
    Nice
  • Print_ISBN
    0-7803-6319-1
  • Type

    conf

  • DOI
    10.1109/CLEOE.2000.910361
  • Filename
    910361