A monolithic polymeric microgripper with photo-thermal actuation for biomanipulation

Author

Elbuken, Caglar ; Gui, Lin ; Ren, Carolyn L. ; Yavuz, Mustafa ; Khamesee, Mir Behrad

Author_Institution

Mech. & Mechatron. Eng., Univ. of Waterloo, Waterloo, ON

fYear

2008

fDate

5-8 Aug. 2008

Firstpage

707

Lastpage

711

Abstract

Design, simulation, fabrication and characterization of polymeric photo-thermal microgrippers are presented. The microgrippers were fabricated using a single layer of SU-8. Thermal actuation was achieved in a non-contact manner by focusing laser beam on the grippers from a remote source. Finite element simulations of the microgrippers are presented to investigate the temperature distribution, finger deflection and induced stress. The experimental results demonstrate that the polymeric microgripper with a length of 900 mum can achieve a deflection of 22 mum. The microgrippers also feature high repeatability and biocompatibility, therefore they can be used for microassembly and biomanipulation applications specifically for single cell manipulation.

Keywords

finite element analysis; grippers; medical robotics; micromanipulators; temperature distribution; biocompatibility; biomanipulation; finger deflection; finite element simulation; high repeatability; induced stress; laser beam; monolithic polymeric microgripper; polymeric photo-thermal microgripper; size 900 mum; temperature distribution; thermal actuation; Automation; Finite element methods; Grippers; Heat transfer; Mechatronics; Optical device fabrication; Optical devices; Polymers; Silicon; Temperature;

fLanguage

English

Publisher

ieee

Conference_Titel

Mechatronics and Automation, 2008. ICMA 2008. IEEE International Conference on

Conference_Location

Takamatsu

Print_ISBN

978-1-4244-2631-7

Electronic_ISBN

978-1-4244-2632-4

Type

conf

DOI

10.1109/ICMA.2008.4798843

Filename

4798843