Sensing system for quantitative analysis of metal particles using laser-induced breakdown spectroscopy

This report describes a real-time sensing system for the detection and analysis of fine metal particles using laser-induced breakdown spectroscopy (LIBS). In conventional particle measurement methods, the scanning mobility particle sizer (SMPS) is widely used to obtain particle size distributions. However, when more details on particles are required, another chemical analysis must be performed separately from the one involving the SMPS. Hence, it is difficult to obtain the size and composition of fine particles in real time by conventional methods. By the proposed LIBS method, it is possible to obtain information on the density of fine particles as well as the chemical components of even ultrafine particles. Metal particles are focused on because the use of metal nanoparticles is expanding with emerging micro- and nanotechnologies. This work describes the use of the LIBS system as a fine metal particle monitoring system in a fabrication process using nanometal materials.