A novel microfabricated high precision vector magnetometer

We present a novel 3-axis MEMS-based vector magnetometer with integrated magnets and piezoresistive detection using silicon nano-gauges. Sensitivities of 9V/T and resolutions below 10nT/√Hz can be achieved with an exceptionally low power consumption of less than 10μW. We have experimentally validated this new magnetometer concept and obtained sensitivity values which were are in good agreement with design. Two perpendicular magnetization axes were integrated in the chip plane in order to achieve 3-D sensitivity. A very high correlation of 99.8% between sensitivities to perpendicular magnetic field components in the chip plane was measured, which makes this sensor highly precise in vectorial measurement of magnetic fields.