• DocumentCode
    2965594
  • Title

    Determination of the mosaic structure of GaN films by high resolution-ray diffraction

  • Author

    Li, Hongtao ; Luo, Yi ; Wang, Lai ; Xi, Guangyi ; Jiang, Yang ; Zhao, Wei ; Yanjun Hall

  • Author_Institution
    Dept. of Electron. Eng., Tsinghua Univ., Beijing
  • fYear
    2008
  • fDate
    2-15 Aug. 2008
  • Firstpage
    141
  • Lastpage
    142
  • Abstract
    Using Pseudo-Voigt functions instead of Gauss or Lorentz functions to fit HR-XRD curves, the widely used Williamson-Hall plot was modified. Then the mosaic structure parameters of various GaN-films were precisely determined by this method.
  • Keywords
    III-V semiconductors; X-ray diffraction; gallium compounds; semiconductor thin films; wide band gap semiconductors; GaN; HR-XRD curves; Williamson-Hall plot; films; high resolution X-ray diffraction; mosaic structure; pseudoVoigt functions; Diffraction; Gallium nitride;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Nano-Optoelectronics Workshop, 2008. i-NOW 2008. International
  • Conference_Location
    Shonan Village
  • Print_ISBN
    978-1-4244-2656-0
  • Type

    conf

  • DOI
    10.1109/INOW.2008.4634485
  • Filename
    4634485
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=2965594