Stability measurements of silicon MEMS resonant thermometers

Author

Ng, Eldwin J. ; Lee, Hyung Kyu ; Ahn, Chae Hyuck ; Melamud, Renata ; Kenny, Thomas W.

Author_Institution

Dept. of Mech. Eng., Stanford Univ., Stanford, CA, USA

fYear

2011

fDate

28-31 Oct. 2011

Firstpage

1257

Lastpage

1260

Abstract

The stability of single-anchored Double-Ended Tuning Fork (DETF) resonators fabricated in single-crystal silicon with an epi-seal process was investigated. Using two devices side-by-side, the common-mode noise from ambient temperature fluctuations was eliminated to distinguish the inherent noise of the resonator. With 1 s integration time, the two silicon resonators demonstrate a relative frequency stability of 4.8 ppb (standard deviation) over three weeks, corresponding to a temperature resolution of 0.16 mK.

Keywords

elemental semiconductors; micromechanical resonators; microsensors; silicon; stability; temperature measurement; thermometers; vibrations; Si; ambient temperature fluctuations; common-mode noise; epi-seal process; relative frequency stability; silicon MEMS resonant thermometers; silicon resonators; single-anchored DETF resonators; single-anchored double-ended tuning fork resonators; single-crystal silicon; stability measurements; temperature resolution; Circuit stability; Frequency measurement; Noise; Resonant frequency; Temperature measurement; Temperature sensors; Thermal stability;

fLanguage

English

Publisher

ieee

Conference_Titel

Sensors, 2011 IEEE

Conference_Location

Limerick

ISSN

1930-0395

Print_ISBN

978-1-4244-9290-9

Type

conf

DOI

10.1109/ICSENS.2011.6127252

Filename

6127252